A flexible, light-weight multichannel sieve electrode with integrated cables for interfacing regenerating peripheral nerves

It has been shown previously that peripheral nerve axons regenerate through microvias in silicon devices. A major challenge in the design of biocompatible interface is to establish a reliable electrical and mechanical interconnection to signal-processing and transmission electronics which allows simultaneous multichannel recordings or stimulation of nerves. This paper describes the on-going work of developing a new generation of flexible and extremely light-weight electrode arrays with integrated cables. A process technology has been established to fabricate a multilayer device with micromachining methods, which overcomes the 'classical' separation of substrate and insulation layers. The micromachined electrodes exhibit promising mechanical stability and high insulation resistance.