2017
Conference Paper
Title

Results of multi-mass high precision vibratory MEMS gyroscopes for two types of system approaches

Author(s)
Popova, I.
Lestev, A.
Fedorov, M.
Rakityansky, O.
Ivanov, V.
Semenov, A.
Forke, Roman  
Shaporin, Alexey
Hiller, Karla  
Koehler, D.
Konietzka, S.
Mainwork
Conference
Language
English