English
Deutsch
Log In
Log in with Fraunhofer Smartcard
Password Login
Research Outputs
Fundings & Projects
Researchers
Institutes
Statistics
Fraunhofer-Gesellschaft
Home
Fraunhofer-Gesellschaft
Konferenzschrift
Selective Induction Heating of Metallic Microstructures for Wafer-Level MEMS Packaging
Details
Full
Export
Statistics
Options
Show all metadata (technical view)
2019
Conference Paper
Title
Selective Induction Heating of Metallic Microstructures for Wafer-Level MEMS Packaging
Author(s)
Froehlich, A.
Hofmann, Christian
Rochala, P.
Kimme, J.
Kroll, M.
Kraeusel, V.
Mainwork
HES-19, International Conference on Heating by Electromagnetic Sources
Conference
International Conference on Heating by Electromagnetic Sources (HES) 2019
Language
English
Fraunhofer-Institut für Elektronische Nanosysteme ENAS
