2000
Conference Paper
Title

Wafer conserving full range construction analysis for IC fabrication and process development based on FIB/dual beam inline application

Author(s)
Boit, C.
Dawes, N.
Dziesiaty, A.
Demm, E.
Ebersberger, B.
Frey, L.
Geyer, S.
Hirsch, A.
Lehrer, C.
Meis, P.
Kamolz, M.
Lezec, H.
Rettenmaier, H.
Tittes, W.
Treichler, R.
Weiland, R.
Zimmermann, H.
Mainwork
Conference
Language
English