Printed Anisotropic Magnetoresistive Sensors on Flexible Polymer Foils

The experimental approach to the fabrication of flexible anisotropic magnetoresistive (AMR) sensors for magnetic field detection in the mT range is validated. It is based upon a combination of screen printing with high-power diode laser array post-processing, both of which are scalable and high-throughput methods. The whole process chain is evaluated, including powder preparation, paste formulation, screen printing, laser sintering, and characterization of microstructure and magnetoresistive response of the resulting sensors. Using high-quality permalloy powder with platelet geometry, the sensors with an AMR effect of 0.5–0.6% at 2–3 mT were realized on polymer substrates. The further optimization of the sensors’ preparation steps is in progress.