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Development of silicon integrated rechargeable lithium microbatteries
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2012
Conference Paper
Title
Development of silicon integrated rechargeable lithium microbatteries
Author(s)
Marquardt, Krystan
Stolle, T.
Ferch, M.
Hahn, Robert
Thunman, M.
Mainwork
Smart Systems Integration 2012. CD-ROM
Conference
International Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, NEMS, ICs and Electronic Components 2012
Language
English
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM