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  4. Deterministic scheduling of wafer fab operations
 
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2003
Conference Paper
Title

Deterministic scheduling of wafer fab operations

Abstract
In this paper, we present a modification of the Shifting Bottleneck heuristic (MSB) for scheduling wafer fabrication facilities. Implementing a determinstic scheduling approach within a simulation model (ASAP) is nontrivial. The simulation model serves as the MES system emulator in addition to performing traditional simulation tasks. Implementation issues as well as results of the MSB are presented.
Author(s)
Pabst, D.
Fowler, J.W.
Pfund, M.
Mason, S.J.
Rose, O.
Mönch, L.
Sturm, R.
Mainwork
Worldwide Automation Symposium 2003  
Conference
Worldwide Automation Symposium 2003  
Language
English
Fraunhofer-Institut für Produktionstechnik und Automatisierung IPA  
Keyword(s)
  • wafer fabrication

  • Halbleiter

  • Simulation

  • Fertigung

  • Planung

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