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Influence of SiH4 on the WN4-PECVD process
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2003
Conference Paper
Title
Influence of SiH4 on the WN4-PECVD process
Author(s)
Ecke, R.
Schulz, S.E.
Hecker, M.
Mattern, N.
Gessner, T.
Mainwork
Materials for advanced metallization
Conference
European Workshop on Materials for Advanced Metallization (MAM) LaLondeLesMaures
Language
English
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM