2001
Journal Article
Title

Ultrananocrystalline diamond thin-films for MEMS and moving mechanical assembly devices

Author(s)
Krauss, A.R.
Auciello, O.
Gruen, D.M.
Jayatissa, A.
Sumant, A.
Tucek, J.
Mancini, D.C.
Moldovan, N.
Erdemir, A.
Ersoy, D.
Gardos, M.N.
Busmann, H.G.
Meyer, E.M.
Ding, M.Q.
Journal
DOI
Language
English