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Pill-box capless thermal-heat-pulse annealing of ion-implanted GaAs.
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1984
Journal Article
Title
Pill-box capless thermal-heat-pulse annealing of ion-implanted GaAs.
Other Title
Thermisches Impulsausheilen von implantiertem GaAs
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Author(s)
Haydl, W.H.
Journal
IEEE Electron Device Letters
Language
English
Fraunhofer-Institut für Angewandte Festkörperphysik IAF
Keyword(s)
Galliumarsenid
Ionenimplantation
Substrat
Wärmeimpuls(kurzzeitig)
