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  4. Direct laser interference patterning of nickel molds/sleeves used for thermal plate-to-plate and roll-to-roll nanoimprint lithography
 
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2016
Poster
Title

Direct laser interference patterning of nickel molds/sleeves used for thermal plate-to-plate and roll-to-roll nanoimprint lithography

Title Supplement
Poster presented at 15th International Conference on Nanoimprint and Nanoprint Technology - NNT 2016, Braga, September 26-28, 2016
Author(s)
Rank, Andreas
Fraunhofer-Institut für Werkstoff- und Strahltechnik IWS  
Lang, Valentin
Fraunhofer-Institut für Werkstoff- und Strahltechnik IWS  
Kunze, Tim
Fraunhofer-Institut für Werkstoff- und Strahltechnik IWS  
Lasagni, Andrés-Fabián  
Fraunhofer-Institut für Werkstoff- und Strahltechnik IWS  
Funder
Deutsche Forschungsgemeinschaft DFG  
Conference
International Conference on Nanoimprint & Nanoprint Technology (NNT) 2016  
File(s)
Download (2.31 MB)
Rights
Use according to copyright law
DOI
10.24406/publica-fhg-393584
Language
English
Fraunhofer-Institut für Werkstoff- und Strahltechnik IWS  
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