Development of a micro-fluid system as a demonstrator for a myTAS

An integrated micro-fluid demonstrator was developed to investigate the design methodology for micro-engineered fluid devices. The micro fluid system comprises three micro pumps, three flow sensors, two conductivity sensors and two passive check valves, which are mounted onto a silicon backplane with outer dimensions of 19.5 x 43 mm2. Micro channels with low dead volume were anisotropically etched into the backplane to connect all devices. The backplane is covered with pyrex glass using anodic bonding. The demonstrator was designed as a chemical analysis system. It is able to calibrate the conductivity sensors by supplying a calibration standard, to transport a liquid sample into the system, to measure the conductivity of the sample and to rinse the system with a carrier liquid. A system control including the device electronics was developed to control the measurement cycle from a PC. Moreover, a proposal concerning a general interfacing standard for micro-fluid systems was worked out, which adresses the geometry of the devices on the backplane, the placement of the fluid ports, the mounting technology, the electrical connections, the system requirements, the chemical compatibility of materials exposed to the liquid, pretesting procedures of the fluid devices, priming of the system and particle control.