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  4. Structuring of carbon nanotubes for field emission based movement sensors
 
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2012
Conference Paper
Title

Structuring of carbon nanotubes for field emission based movement sensors

Abstract
This paper addresses the exploitation of the field emitting properties of carbon nanotubes for movement sensor applications. To utilize this transducer principle a well defined gap between the field emitting carbon nanotubes and the counter electrode must be formed. Three different methods to dissect the dielectrophoretically deposited carbon nanotubes in a reproducible way are presented.
Author(s)
Loschek, S.
Hermann, Sascha  
Yu, H.
Schulz, Stefan E.  
Geßner, Thomas  
Mainwork
9th International Multi-Conference on Systems, Signals and Devices, SSD 2012  
Conference
International Multi-Conference on Systems, Signals and Devices (SSD) 2012  
DOI
10.1109/SSD.2012.6198083
Language
English
Fraunhofer-Institut für Elektronische Nanosysteme ENAS  
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