2015
Journal Article
Title

k-restore Process with Plasma Enhanced Fragmentation for Damaged ULK Materials - A DFT and MD Study

Title Supplement
Abstract
Author(s)
Foerster, A.
Wagner, Christian Friedemann  orcid-logo
Schuster, Jörg  
Gemming, S.
Schulz, Stefan E.  
Journal
Conference
Language
English