1981
Conference Paper
Title

Distortion measurements on pure-silicon and siliconplastic X-ray masks

Other Title
Verzugsmessungen an Reinsiliziummasken und Silizium-Plastikmasken fuer die Roentgenlithographie
Author(s)
Triantafyllou, M.
Betz, H.
Heuberger, A.
Tischer, P.
Mainwork
Conference
Language
English
Keyword(s)