Low loss singlemode optical waveguides with large cross-section in silicon-on-insulator

The realisation of singlemode rib waveguides in silicon-on-insulator (SOI) having a width and height of several micrometres is reported. Measurements at a wavelength of 1x3 and 1x55fm yield waveguide losses below 0x5dB/cm and an excellent agreement of the near field intensity distribution with the one predicted by a BPM simulation.