Particle measurements in turbulent flow areas as as part of investigations at cleanroom equipment

The cleanroom suitability as an acceptance criteria of equipment gets more and more important for the user. Equipment with particle emission always produces particle deposition on the product causing failures. An overall method for investigations of the cleanroom suitability has been developed and will be introduced in an overview. This method contains different parameters like, flow disturbance, particle emission in the air and particle deposition on surfaces. The focus in here covers the area of airborne particle measurements in and around equipment in turbulent flow areas.