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Design of a micro-optical low coherent interferometer array for the characterisation of MEMS and MOEMS
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2009
Conference Paper
Title
Design of a micro-optical low coherent interferometer array for the characterisation of MEMS and MOEMS
Author(s)
Gastinger, K.
Haugholt, K.H.
Røyset, A.
Albero, J.
Zeitner, U.
Gorecki, C.
Mainwork
Fringe 2009, 6th International Workshop on Advanced Optical Metrology
Conference
Fringe, International Workshop on Advanced Optical Metrology 2009
DOI
10.1007/978-3-642-03051-2-104
Language
English
Fraunhofer-Institut für Angewandte Optik und Feinmechanik IOF
