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  4. Characterization of Humidity-Sensors based on Polymer Sensing Layer
 
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August 31, 2022
Master Thesis
Title

Characterization of Humidity-Sensors based on Polymer Sensing Layer

Abstract
In this study various electrical properties of humidity sensors based on polyimide (PI) layer were characterized. The sensors were manufactured at the Fraunhofer Institute for Microsystems and Solid-State Technology (EMFT) as Inter Digital Transducers (IDT) with a polyimide layer. Changes in the electrical properties were due to a change in the permittivity of the PI layer under different environmental conditions. Using Wafer Prober, EMFT sensors were characterized at different temperatures and bias voltages. The capacitance measurements were conducted for a frequency range from 1 kHz to 1 MHz at the Fraunhofer EMFT. Two reference sensors were compared with HAST (Highly Accelerated Stress Test) built-in sensors to monitor humidity and temperature inside the HAST chamber. Afterward, EMFT sensors were tested at 130 °C and 85 % RH inside the HAST chamber.
Thesis Note
München, Hochschule, Master Thesis, 2022
Author(s)
Ali, Syed Fahad  
Fraunhofer-Einrichtung für Mikrosysteme und Festkörper-Technologien EMFT  
Advisor(s)
Boudaden, Jamila  
sl-0
Ramm, Peter  
sl-0
File(s)
Download (1.9 MB)
Rights
Use according to copyright law
DOI
10.24406/publica-528
Language
English
Fraunhofer-Einrichtung für Mikrosysteme und Festkörper-Technologien EMFT  
Keyword(s)
  • Inter Digital Transducer

  • Polyimide PI

  • EMFT sensors

  • HAST chamber (Highly Accelerated Stress test)

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