2001
Journal Article
Title

A single-crystal Si-resonator with on-chip readout amplifier in standard CMOS

Author(s)
Bertz, A.
Symanzik, H.
Steiniger, C.
Höffer, A.
Griesbach, K.
Stegemann, K.
Ebest, G.
Gessner, T.
Journal
DOI
Language
English