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Sidewall Damage Analysis of Low-k Dielectricmaterial by Using Energy-Filtered Transmission Electron Microscopy
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2014
Conference Paper
Title
Sidewall Damage Analysis of Low-k Dielectricmaterial by Using Energy-Filtered Transmission Electron Microscopy
Author(s)
Singh, P.K.
Zimmermann, Sven
Waechtler, T.
Schulze, Steffen
Schulz, Stefan E.
Hietschold, Michael
Mainwork
MAM 2014, Workshop on "Materials for Advanced Metallization". CD-ROM
Conference
Workshop on "Materials for Advanced Metallization" (MAM) 2014
Language
English
Fraunhofer-Institut für Elektronische Nanosysteme ENAS
