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  4. Actuated micro-optical submount using a dielectric elastomer actuator
 
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2011
Journal Article
Title

Actuated micro-optical submount using a dielectric elastomer actuator

Abstract
Analysis of the operating characteristics of a dielectric elastomer actuator (DEA) submount for the high-precision positioning of optical components in one dimension is presented. Precise alignment of a single-mode fiber is demonstrated and variation of the sensitivity of the submount motion by changing the bias voltage is confirmed. A comparison of the performance of the DEA submount with a piezoelectric alignment stage is made, which demonstrates that DEAs could present a very attractive, low-cost alternative to currently used manual technologies in overcoming the hurdle of expensive packaging of single-mode optical components.
Author(s)
Jordan, G.
McCarthy, D.N.
Schlepple, N.
Krißler, J.
Schröder, H.
Kofod, G.
Journal
IEEE ASME transactions on mechatronics  
DOI
10.1109/TMECH.2010.2089991
Language
English
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM  
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