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A MEMS friction vacuum gauge suitable for high temperature environment
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2008
Conference Paper
Title
A MEMS friction vacuum gauge suitable for high temperature environment
Author(s)
Tenholte, D.
Kurth, S.
Gessner, T.
Dötzel, W.
Mainwork
Eurosensors XX, the 20th European Conference on Solid-State Transducers
Conference
Eurosensors 2006
DOI
10.1016/j.sna.2007.05.031
Language
English
Fraunhofer-Institut für Elektronische Nanosysteme ENAS
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM