New Sequential Manufacturing Process for Micro and Finishing Machining

The article describes a sequential process of micro cutting, laser structuring and laser finishing processes for machining dies and moulds metal forming, plastic moulding and other replication technologies exemplified at microfluidic systems. Structure size, geometry, dimensions and the arrangement of the micro structures affect the process chain concerning order of laser and cutting processes with fundamental influence on producibility and overall machining time under consideration of reachable material removal rates. Further on the different machining processes allow to generate different surface profiles and different roughness properties. Especially laser ablation and laser polishing of surface details enable modifications of functional properties in the fluidic system, which can be multiplied by forming process.