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  4. Thermal stability of spatial ALD deposited Al2O3 capped by PECVD SiNx for the passivation of lowly- and highly-doped p-type silicon surfaces
 
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2012
Conference Paper
Title

Thermal stability of spatial ALD deposited Al2O3 capped by PECVD SiNx for the passivation of lowly- and highly-doped p-type silicon surfaces

Abstract
Al2O3 deposited by atomic layer deposition (ALD) is known to provide an excellent passivation on lowly- and highly-doped p-type silicon surfaces even after contact firing processes. Therefore, Al2O3 layers are of great interest for the passivation of the rear side of p-type solar cells as well as the boron-doped emitter of n-type solar cells. In this work we studied the passivation quality of fired Al2O3/SiNx layer stacks on lowly- and highly-doped p-type silicon surfaces applying an in-line capable, spatial ALD tool for the Al2O3 deposition. On both surfaces we observed a very high level of surface passivation for stacks with 4 nm Al2O3 after firing. For lowly-doped p-type wafers, we measured effective lifetimes up to ~2.8 ms, which correspond to an upper limit for the surface recombination velocity of ~3 cm/s. On textured p+np+ samples diffused with a shallow boron doped emitter, we obtained emitter saturation current densities around 50 fA/cm2, allowing an open-circuit voltage potential in the range of 700 mV. Spatially resolved lifetime images revealed a very uniform passivation over the whole wafer for both types of samples. These results demonstrate that Al2O3/SiNx stacks are well suited for the industrial fabrication of p-type and n-type solar cells, without the necessity of an extra thermal out-gassing step between Al2O3 and SiNx deposition.
Author(s)
Richter, Armin  
Souren, F.M.M.
Schuldis, D.
Görtzen, R.M.W.
Benick, Jan  
Hermle, Martin  
Glunz, Stefan W.  
Mainwork
27th European Photovoltaic Solar Energy Conference and Exhibition, EU PVSEC 2012. DVD-ROM  
Conference
European Photovoltaic Solar Energy Conference and Exhibition (EU PVSEC) 2012  
DOI
10.4229/27thEUPVSEC2012-2AV.5.25
Language
English
Fraunhofer-Institut für Solare Energiesysteme ISE  
Keyword(s)
  • Solarzellen - Entwicklung und Charakterisierung

  • Silicium-Photovoltaik

  • Oberflächen - Konditionierung

  • Passivierung

  • Lichteinfang

  • Herstellung und Analyse von hocheffizienten Solarzellen

  • Produktionsanlagen und Prozessentwicklung

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