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Low oxygen content trimethylaluminium and trimethylindium for MOVPE of light emitting devices
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2000
Journal Article
Title
Low oxygen content trimethylaluminium and trimethylindium for MOVPE of light emitting devices
Author(s)
Smith, L.M.
Rushworth, S.A.
Ravetz, M.S.
Odedra, R.
Konjolia, R.
Agert, Carsten
Dimroth, Frank
Schubert, U.
Bett, Andreas W.
Journal
Journal of Crystal Growth
DOI
10.1016/S0022-0248(00)00654-0
Language
English
Fraunhofer-Institut für Solare Energiesysteme ISE
Keyword(s)
Epitaxie
Epitaxie MOVPE