1995
Journal Article
Title

Fabrication of 100 nm polysiliconemitter transitors using e-beam lithography

Author(s)
Webster, M.N.
Tuinhout, A.
Verbruggen, A.H.
Romijn, J.
Radelaar, S.
Löchel, B.
Jos, H.F.F.
Moors, P.M.A.
Journal
DOI
Language
English