Advanced silicon micromachining

This paper summarizes two novel technology approaches for advanced Silicon micro machining of MEMS devices and presents applications using these processes. These MEMS devices are Atomic Force microtip structures, tunable Fabry-Perot-Filters for IR spectral range and integrated micro mirror arrays for Hadamard transform optics. Process characteristics as well as thermal and long-time behavior of the microstructures are presented, indicating the high reliability of the technologies.