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Chip Formation and Sub-surface Damage in Ductile Mode Grinding of Semiconductors
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1998
Conference Paper
Title
Chip Formation and Sub-surface Damage in Ductile Mode Grinding of Semiconductors
Author(s)
Uhlmann, E.
Engel, H.
Paesler, C.
Mainwork
American Society for Precision Engineering. 13th Annual Meeting 1998. Proceedings
Conference
American Society for Precision Engineering (Annual Meeting) 1998
Language
English
Fraunhofer-Institut für Produktionsanlagen und Konstruktionstechnik IPK
