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  4. Raman spectroscopy of delta-doped GaAs layers and wires.
 
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1992
Conference Paper
Title

Raman spectroscopy of delta-doped GaAs layers and wires.

Other Title
Ramanspektroskopie delta-dotierter GaAs-Schichten und Drähte
Abstract
Raman spectroscopy is used to study the incorporation of Si in Delta-doped GaAs layers via light scattering by local vibrational modes. This includes the analysis of Si monolayers embedded in GaAs. Raman scattering by excitations of the two- dimensional electron gas in Delta-doped GaAs gives information on the subbands formed by the space charge induced potential well. In addition the effect of additional lateral confinement on these subbands can be studied.
Author(s)
Wagner, J.
Mainwork
Spectroscopic characterization techniques for semiconductor technology IV  
Conference
Conference "Spectroscopic Characterization Techniques for Semiconductor Technology 1992  
Language
English
Fraunhofer-Institut für Angewandte Festkörperphysik IAF  
Keyword(s)
  • delta-doping

  • Delta-Dotierung

  • GaAs

  • raman spectroscopy

  • Ramanspektroskopie

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