Silicon microsystems for mechatronic applications

While modern microelectronic fabrication processes allow monolithic integration of millions and millions of electronic devices on tiny silicon chips and thus form a technological base for implementation of high-performance electronic systems, they are also capable of realizing sensing and actuating functions. Although this may require some minor changes in standard processing and thus increase the fabrication costs, the unique combination of sensors, actuators, and electronic circuits can provide implementation of miniature microsystems featuring unprecedented functionality. Their principles, potentials, and applications in mechatronic systems are the central topic of this contribution.