Sensoren auf der Basis von Oberflächenwellenbauelementen für Messungen in Flüssigkeiten

A considerable demand for precision liquid-sensors designed to detect a variety of substances is obvious in the supervision of physiological procedures, biotechnological processes and in environmental analytics. Microweighing with SAW-devices is a highly promising sensing principle with respect to the sensitivities that can be obtained. Mass loading of a few pg of a substance on the sensor surface can still be detected significantly using specially designed SAW-devices. Sensing system based on a HPSW-delay line is presented. It renders the on-line detection of mass loading even in liquid media. The successful use of HPSW-modes for SAW-sensors marks a major breakthrough in the application of SAW-sensors for measurements in liquids.