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Excimer laser structuring of epoxy resin layers for MCM-L applications
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1993
Journal Article
Title
Excimer laser structuring of epoxy resin layers for MCM-L applications
Author(s)
Kersten, P.
Glaw, V.
Reichl, H.
Journal
Circuit World
DOI
10.1108/eb046233
Language
English
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM
