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Focused Ion Beam (FIB) as an Analytical Tool in Micro- and Nanotechnology
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2007
Conference Paper
Title
Focused Ion Beam (FIB) as an Analytical Tool in Micro- and Nanotechnology
Author(s)
Gollhardt, A.
Michel, B.
Mainwork
MicroNanoReliability 2007, 1st World Congress MicroNanoReliability
Conference
International Congress on Microreliability and Nanoreliability in Key Technology Applications (MNR) 2007
World Congress MicroNanoReliability 2007
Language
English
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM
