English
Deutsch
Log In
Log in with Fraunhofer Smartcard
Password Login
Research Outputs
Fundings & Projects
Researchers
Institutes
Statistics
Fraunhofer-Gesellschaft
Home
Fraunhofer-Gesellschaft
Konferenzschrift
CVD-CoXN for advanced semiconductor metallization
Details
Full
Export
Statistics
Options
Show all metadata (technical view)
2016
Presentation
Title
CVD-CoXN for advanced semiconductor metallization
Title Supplement
Presentation held at 25th Materials for Advanced Metallization Conference, MAM 2016, 20-23 March 2016, Brussels, Belgium
Show more
Author(s)
Dhavamani, Abitha
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
Wislicenus, Marcus
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
Gerlich, Lukas
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
Uhlig, Benjamin
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
Conference
Materials for Advanced Metallization Conference (MAM) 2016
Request publication:
bibliothek@ipms.fraunhofer.de
Language
English
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
