2001
Conference Paper
Title

Electrical and optical interconnection-technology based on ORMOCERĀ®. Inorganic-organic hybrid materials

Abstract
Photopatternable hybrid inorganic-organic polymers with negative resist behavior were developed and tested for evaluation in optical and electrical interconnection technology. Systematic variation of composition combined with adaptation to micro system technology allowed great flexibility in processing.
Author(s)
Popall, M.
BĆ¼strich, R.
Kahlenberg, F.
Andersson, A.
Haglund, J.
Robertsson, M.E.
Blau, G.
Gale, M.
Rƶsch, O.
Dabek, A.
Neumann-Rodekirch, J.
Cergel, L.
Lambert, D.
Mainwork
Conference
Language
English