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Table-top reflectometer in the extreme ultraviolet for surface sensitive analysis
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2009
Journal Article
Title
Table-top reflectometer in the extreme ultraviolet for surface sensitive analysis
Author(s)
Banyay, M.
Juschkin, L.
Journal
Applied Physics Letters
DOI
10.1063/1.3079394
Language
English
Fraunhofer-Institut für Lasertechnik ILT
