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Improvement of yield and reliability of sub-30 nm structures with finite element analysis in BEOL stress engineering
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2014
Book Article
Title
Improvement of yield and reliability of sub-30 nm structures with finite element analysis in BEOL stress engineering
Author(s)
Kaulfersch, Eberhard
Brämer, Birgit
Breuer, D.
Rzepka, Sven
Clauss, E.
Feustel, F.
Michel, Bernd
Mainwork
Smart systems integration for micro- and nanotechnologies
Language
English
Fraunhofer-Institut für Elektronische Nanosysteme ENAS
