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Modeling a collisional, capacitive sheath for surface modification applications in radio-frequency discharges
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1992
Journal Article
Title
Modeling a collisional, capacitive sheath for surface modification applications in radio-frequency discharges
Author(s)
Borning, K.
Journal
Applied Physics Letters
DOI
10.1063/1.107248
Language
English
Fraunhofer-Institut für Siliziumtechnologie ISIT
