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Coatings for the next generation micro mechanical mirrors
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2004
Conference Paper
Title
Coatings for the next generation micro mechanical mirrors
Author(s)
Gatto, A.
Yang, M.
Kaiser, N.
Mainwork
Optical interference coatings 2004. CD-ROM
Conference
Topical Meeting and Tabletop Exhibit Optical Interference Coatings 2004
Language
English
Fraunhofer-Institut für Angewandte Optik und Feinmechanik IOF
