The Economic Potential of Miniaturization from the Industrial Viewpoint

1. USA, Japan, Germany: Leading Nations in field of Microtechnolgy. 2. USA: Mass Production of MEMS functional parts. Now in phase of pace regulation. 3. Japan: Long term planning for development of elementary microsystem technology. 4. Germany: Application market oriented. Utilize the grown market situation and infratechnology. In spite of the last 10 years investment, no one of these three nations has the appropriate technology for mass production, which is based on the semiconductor fabrication technology and can be used eventually in industry. But the pressure of international competition is enormous, thus, they will continue their development efforts.