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Adaption of functional ceramic materials for the laser sintering process in integrated sensor applications
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2016
Journal Article
Title
Adaption of functional ceramic materials for the laser sintering process in integrated sensor applications
Author(s)
Gradmann, Rena
Fraunhofer-Institut für Keramische Technologien und Systeme IKTS
Seuthe, Thomas
Fraunhofer-Institut für Keramische Technologien und Systeme IKTS
Vedder, Christian
Fraunhofer-Institut für Lasertechnik ILT
Eberstein, Markus
Fraunhofer-Institut für Keramische Technologien und Systeme IKTS
Partsch, Uwe
Fraunhofer-Institut für Keramische Technologien und Systeme IKTS
Journal
Journal of microelectronics and electronic packaging
DOI
10.4071/imaps.515
Language
English
Fraunhofer-Institut für Keramische Technologien und Systeme IKTS