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Studies on the piezoresistive effect in MOS transistors for use in integrated MEMS sensors
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2013
Conference Paper
Title
Studies on the piezoresistive effect in MOS transistors for use in integrated MEMS sensors
Author(s)
Haas, S.
Schramm, M.
Loebel, K.-U.
Heinz, S.
Reuter, Danny
Bertz, Andreas
Horstmann, J.T.
Geßner, Thomas
Mainwork
Smart Systems Integration 2013. CD-ROM
Conference
International Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, NEMS, ICs and Electronic Components 2013
Language
English
Fraunhofer-Institut für Elektronische Nanosysteme ENAS
