June 14, 2024
Presentation
Title

Silicon integrated electrostatic drives

Title Supplement
Presentation held at ACTUATOR 2024, International Conference and Exhibition on New Actuator Systems and Applications, June 13 - 14, 2024, Wiesbaden, Germany
Author(s)
Schenk, Harald  
Fraunhofer-Institut für Photonische Mikrosysteme IPMS  
Conference
File(s)
Rights
Use according to copyright law
DOI
Language
English
Fraunhofer Group
Keyword(s)