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From modular MEMS to a modular microfactory - the hybrid microfactory?
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2001
Conference Paper
Title
From modular MEMS to a modular microfactory - the hybrid microfactory?
Author(s)
Großer, V.
Michel, B.
Schuenemann, M.
Reichl, H.
Mainwork
Mechanical reliability simulation characterisation testing
Conference
Workshop Micro Materials Testing and Simulation 2001
Language
English
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM
