Quasi-static microscanner with linearized scanning for an adaptive 3D-laser camera

This paper presents a gimbaled MEMS scanning mirror especially developed for adaptive raster scanning in a novel 3D-ToF laser camera. Substantial quasi-static deflections of ±10° are provided by vertical comb drives in vertical direction in contrast to resonant horizontal scanning of the 2.6×3.6mm elliptical mirror at 1600Hz and 80° FOV. To guarantee the full reception aperture of effective 5mm a synchronized driven array - consisting of five hybrid assembled MEMS devices with integrated position feedback - is used by the 3D camera enabling a distance measuring rate of 1MVoxel/s and an uncertainty of ToF distance measurement of 5mm at 7.5m.