Smart power with 1200V DMOS

This paper describes a Smart-Power-Process which integrates a vertical 1200V DMOS power transistor and low voltage CMOS circuits. For isolation purpose between the CMOS part and the high voltage power device the local SIMOX-process is used (separation by implanted oxygen) with a pn junction in series. For the first time a scalable vertical 1200V high power switching device has been combined with VLSI compatible CMOS to realize a resonant power supply circuit for compact fluoresant lamps. The functionallity of the introduced process has been demonstrated by a monolithic integrated five terminal device for compact fluorescent lamps.