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NEMS/MEMS and passive components integration by using novel LTCC substrate
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2010
Conference Paper
Title
NEMS/MEMS and passive components integration by using novel LTCC substrate
Author(s)
Frömel, J.
Lin, Y.
Mori, M.
Tanaka, S.
Geßner, Thomas
Esashi, M.
Mainwork
Smart systems integration 2010. 4th European Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, MOEMS, ICs and Electronic Components. CD-ROM
Conference
European Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, MOEMS, ICs and Electronic Components 2010
Language
English
Fraunhofer-Institut für Elektronische Nanosysteme ENAS
