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Pulse duration and energy density influence on laser processing of metals with short and ultrashort pulses
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2005
Conference Paper
Title
Pulse duration and energy density influence on laser processing of metals with short and ultrashort pulses
Author(s)
Harzic, Ronan Le
Fraunhofer-Institut für Biomedizinische Technik IBMT
Breitling, D.
Sommer, S.
Fohl, C.
Valette, S.
König, K.
Dausinger, F.
Audouard, E.
Mainwork
Photon processing in microelectronics and photonics IV
Conference
Conference on Laser Applications in Microelectronic and Optoelectronic Manufacturing
DOI
10.1117/12.587540
Language
English
Fraunhofer-Institut für Biomedizinische Technik IBMT