2016
Conference Paper
Title

Roughness evolution of multilayer coatings for 6.7 nm and its impact on light scattering

Abstract
The roughness evolution as well as its impact on the light scattering properties of La/B4C and Ru/B4C multilayer coatings for a wavelength of 6.7 nm are studied by analyzing multilayer stacks with different numbers of layers.
Author(s)
Trost, M.
Schröder, S.
Yulin, S.
Duparre, A.
Mainwork
Conference
DOI
Language
English